Metrology – X-ray rocking curve mapping

System with shielding enclosure on optical table

System with shielding enclosure on optical table

X,Y,Z,Ө stages, detector

X,Y,Z,Ө stages, detector

Data evaluation

Data evaluation

High resolution rocking curve scans along a 100mm long line inside a 100*100mm2 surface area.
Large system volume allows for full crystal systems with a height up to 220mm, i.e due to heat exchangers.
Automatic data evaluation provides height profiles from integrated rocking curve shifts.