Guide for the regeneration of getter pumps

Proceeding:

  • Dismantle heater items and magnets.
  • Dismantle feedthrough.
  • Dismantle pump modules.
  • Put old seals on the flanges.
  • Mount flange fittings on the open flanges.
  • Dismantle pump modules in all invidual parts.
  • Glow ceramics approx. 30 minutes at 800°C on air. (Touch the ceramics only with gloves!)
  • Glass-bead-blast all other parts and the chassis.
  • Dismantle flange fittings and seals.
  • Wash and dry the chassis and individual parts. (Except ceramics)
  • Reassemble the pump modules.
  • Glow the complete pump modules 2 hours at 750°C in a clean vacuum oven.
  • Install the pump modules in the chassis.
  • Clean the feedthrough with alcohol, maybe take a new one.
  • Install the feedthrough and close the pump with a valve.
  • Install magnets and heater items.
  • The electrician must check the wirering and the heater items, maybe change it.
  • Pump the getter pump with a turbo pumping system and make a leak detection.
  • Bake the pump for 30 hours and switch on the high voltage on the last 10 hours.
  • If the pump is cold, make a leak detection again.
  • If the pressure < 5 x 10-10 , the pump is ok.
  • Lock the pump under vacuum for storage.