Microscopy

Responsible: Dr. Thomas F. Keller

AFM at DESY NanoLab (left) and block copolymer on pre-patterned surfaces before (top right) and after annealing (bottom right)

AFM

Dimension Icon AFM

Major operating modes:
• PeakForce tapping mode with ScanAsyst
• QNM (quantitative nanoscale mechanical characterization)
• Tapping / contact mode
• STM mode (scanning tunneling microscopy)
• Force spectroscopy
• Lateral force microscopy (LFM)
• Magnetic force microscopy (MFM)
• TUNA module (electrical conductivity)
• KPFM module (Kelvin probe force microscopy)

Equipment:
• Icon scanner (90 µm x 90 µm)
• NanoScope V SPM control station
• Optical microscope for laser and sample alignment
• Liquid cell
• Electrochemical cell with potentiostat
• Translation stage for nano-positioning

UHV STM/AFM instrument (courtesy of Omicron, Germany)

Variable Temperature UHV STM/AFM

Equipment and capabilities include:
• Variable temperature range: 50 K < T < 500 K (liquid N2 and option for He cooling)
• x-y translation stage
• Access for optical microscope
• STM tunneling spectroscopy
• High resolution quartz tuning fork AFM
• Magnetic Force Microscopy (MFM) option
• Direct sample transfer under UHV from and to the UHV system

Optical Light Microscope

Optical Light Microscope

Carl Zeiss Axio Imager M2m

High resolution microscope with polarization option for reflection and transmission mode

Translation stage with motorized z-drive
Driving range of translation stage 75 mm x 50 mm
Resolution of Translation stage 0.1 μm
Reproducibility of translation stage: +/- 1 μm
Absolute precision of translation stage: +/- 5 μm

Micro LED for each transmission and reflection mode
Object holders for transmission and reflection mode

Universal condensor with options for bright field and dark field imaging

Polarizer rotatable by 90° with analyzer module for reflection and transmission mode

Objectives EC Epiplan 5x/0.13; 10x/0.25; 20x/0.4; 50x/0.75;
Objective EC Epiplan-Neofluar 100x/0.90

ZEN 2.3 Software (including Multi Channel, Panorama, Manual Extended
Focus, and Image Analysis Modules)

ZEN Modul Tiles & Positions for Positioning and R-localization of pre-selected objects

High Performance Microscopy camera Axiocam 503 color


FE-SEM Nova NanoSEM (courtesy of FEI)

High-Resolution Field-Emission Scanning Electron Microscope (HR-FE-SEM)

High resolution field emission instrument Nova Nano SEM 450 (FEI)

Detectors:
- SE Everhart-Thornley detector (ETD)
- Low vacuum BE detector
- High resolution through-lens detector tunable for SE and BE mode
- High resolution STEM detector for analysis of membranes and thin films in transmission
- X-Max 150 EDS silicon drift detector for elemental analysis, energy resolution 127 eV @ MnKα (Oxford)
- IR-CCD camera to track the sample position

Lateral resolution:
- 1.0 nm at 15 kV
- 1.4 nm at 1 kV
- 0.8 nm at 30 kV (STEM)

- Possible translation of sample stage in x/y: 110 x 110 mm
- Navigation and pattering software
- Low vacuum mode
- Beam deceleration option to analyze isolating sample surfaces
- Dynamical tilt
- Gas injection system to write Pt based markers on sample surfaces via electron beam-induced deposition

SCIOS Dual beam FIB, FEI

Dual-Beam Focused Ion Beam (FIB)

Dual-beam focused ion beam instrument SCIOS, FEI
(Verbundforschungsprojekt Nr. 05K13WC3, University of Bayreuth)

Detectors:
- SE Everhart-Thornley detector (ET-SED)
- In-lens detectors: Lower (T1) and Upper (T2)
- EDAX element silicon drift detector system
- IR-CCD camera to track the sample position

Lateral resolution, electron imaging:
- 1.0 nm at 30 kV
- 1.6 nm at 1 kV
- 2.5 nm at 1 kV at eucentric working distance

Ion optics:
- Voltage: 500 V to 30 kV
- Beam current: 1.5 pA - 65 nA in 15 steps
- Lateral resolution: 3.0 nm

- Nano-manipulator EasyLift EX
- Platinum deposition (Pt) via gas injection system
- Beam deceleration

- Translation of eucentric sample stage in x/y: 110 x 110 mm
- Navigation and pattering software
- Integrated plasma cleaner

Applications:
- Cross section sample preparation
- Nano- and micro-manipulation
- 3D tomographic imaging - Auto Slice & View
  with electron and elemental EDX contrast,
  3D reconstruction with Amira-Avizo Software