Unified Data Sheet

P06 - Micro and Nano-Probe Beamline

GENERAL SPECIFICATIONS

techniques available

micro-XRF, micro-XRD, micro-XAS

photon source

undulator

period

number of periods

max power

31.4 mm;

  60

3.8 kW

source brilliance 

1019 ph / s / 0.1% bw / mA

polarization available

linear horizontal

energy range 

  5 – 100 keV 

beamline energy resolution

1.4 x10-4 dE/E for Si (111)

max flux ON SAMPLE

4x10^10ph/s in KB mirror focus

spot size ON SAMPLE 

80nm x80nm (Nanohutch, NFL, 10-25keV)
300nm x300nm (Microhutch, KB mirrors, 5-23keV)
500nm x 1500nm (Microhutch, CRL, 10-50keV)

angle of incidence light – sample 

0 to 90

sample type

solid or liquid

Beamsize and flux at sample:

Nanoprobe:

80 x 80 nm2 some 107 ph/s (Nano Focusing lenses (NFL) 10-25 keV)

Microprobe:

350 x 350 nm2 some 1010 ph/s (KB mirrors, 5-23 keV)

500 x 1500 nm2 1010 ph/s (compound refractive lenses (CRL), 15-90keV)

Source properties

Source size:

36 x 6 µm2 σ (@12keV)

Source divergence:

28 x 4 µrad2 σ (@12keV)

Transverse coherence length:

ξh ~87mm, ξv ~567mm (@ 100 m and 12keV)

Linear polarization:

99.98 %

Insertion device:

2m Spectroscopy undulator U32, Period length = 31.4 mm, Minimum gap 9.5 mm, first harmonic 2.4 keV


OPTICS

type

  cryo cooled double crystal monochromator (DCM) and cryo cooled channel-cut monochromator (CC)

grating properties 

 Si (111) (DCM and CC)

energy range         

Si111 DCM 2.4-50keV, Si111 CC 6-20 keV

resolving power 

Si:1.4x10-4 dE/E

Double-crystal Monochromator (Oxford High-heatload DCM)

Crystals:

Si(111) pair and Channel-cut

Energy range:

2.4 – 50 keV (DCM), 6 -20 keV (CC)

Double plane mirrors (Zeiss)

for higher harmonics rejection, optional

Coating:

Cr, Si, Pt

Energy range:

4-42 keV

Due to diamond windows and ambient sample environment the lowest feasible beam energy is currently limited to 6 keV.

 

ENDSTATION(S)

Sample positioning

Diffractometer

n.a.

Manipulator 

x,y,z stages and 1 rotation

Sample environment  atmosphere


Sample environment

pressure range

              none

temperature range

             none

humidity range

             none


Detection modes

Transmission 

           yes 

Reflection   

          yes    

Fluorescence           

          yes

Total electron yield

             No

Grazing incidence angle    

             n.a.


Detector(s)

Type 

 Vortex  PCO  MAR165CCD

energy resolution 

 140eV FWHM
  none  none

count rate 

 1Mcps
 

spatial resolution 

 n.a.   1µm  

angular resolution  

  n.a.   n.a.  

2theta range  

  n.a.    

read-out time 

  0.25µs  5ms   2.5s

pixel size         

  n.a.   9µm   15µm

array size 

  n.a.   4008 × 2672 pixel
4096x4096 pixel

field of view  

  50mm2   x10: 3.6mm x 2.4mm
  x25:1.4mm x 1.0mm
  x50:0.7mm x 0.5mm
 165mm diameter

 degrees of freedom / translation stages

 4/ yes
  yes yes 

cradles

  n.a.   n.a.   n.a.

  typical collection time

  0.01-5s   <1s   <1min


spectrometer(s) / microscope(s)

Imaging mode  

scanning mode

type

transmission, fluorescence, absorption, diffraction, diffractive imaging, 2D and 3D

energy resolution

  XRF: 140eV FWH, XAS: 1.410-4eV dE/E

lateral resolution

  Nanoprobe: 80x80nm NFL (10-25 keV)
  Microprobe: 300x300nm KB Mirror (5-23keV), 500x1500nm CRL (15-90keV)

field of view

range 1µm-10mm

 

other facilities available: LEED, control atmosphere, mass analyzer, in-situ devices etc.

 

CONTROL/DATA ANALYSIS

Software type

Online, TANGO, python, perl

Data output type

spectra, images

Data output

ascii, h5

Software(s) for quantitative analysis

AXIL, PyMCA

 

SUPPORT LAB

Sample preparation with optical microscopes.